Ar2 • F2
VUV / Excimer 120-179 nm
|λ [nm]||AR (0°); R <||method||AR (45°); R <||method|
|157||0.5%||on Fluoride||EBE||0.75%||on Fluoride||EBE|
|172||0.5%||on Fluoride||EBE||0.75%||on Fluoride||EBE|
|λ [nm]||HR (0°); R >||method||HR (45°); R >||method|
|126||84%||on Fluoride||EBE||75%||on Fluoride||EBE|
|130||85%||on Fluoride||EBE||80%||on Fluoride||EBE|
|149||91%||on Fluoride||EBE||89%||on Fluoride||EBE|
|157||94% (goal 97%)||on Fluoride||EBE||93% (goal 95%)||on Fluoride||EBE|
|172||95%||on Fluoride||EBE||94%||on Fluoride||EBE|
|157||Rp < 0.3%, Rs > 87%||72° on CaF2||EBE|
|λ [nm]||0°→ 45°; T =||method|
|157||75% → 2%||on CaF2||EBE|
|10% → 70%||on CaF2||EBE|
LASEROPTIK has longtime experience with coatings in the Vacuum Ultraviolet (VUV) range (120-179 nm), especially for 157 nm including dedicated metrology.
The main reason for losses in this spectrum is absorption of water and hydrocarbons. VUV-CaF2 substrates are used to counter these losses. A surface roughness of σRMS < 0.3 nm helps to decrease the losses for all coatings.
We guarantee LIDT > 400 mJ/cm2 with 15 ns pulses for HR 157 nm / 0°.
Our mirrors withstand 2.5 billion pulses at 10 mJ/cm2 without any detectable degradation as reported from a longterm test. The values for PR and AR coatings will be in the same range.
All values are given for standard coatings. Customized coatings available for all types.
Coating methods available:
If not mentioned otherwise, all values and diagrams are given
... for the standard substrate material used in the described wavelength area (mostly Fused Silica or CaF2).
... without consideration of the rear surface.
... with EBE coating technique for a good cost-performance ratio.
Customized coatings are available for all types.
–––– dashed lines show the zoomed curve with the stated magnification
Every coating type can be optimized
• substrate material
• angle of incidence
• GDD value
Alternatively we can create
a totally new design for you.